Temperature & humidity control · Since 2005

Precision
between hot
and cold.

Chillers, heat exchangers and THC units that hold semiconductor and LCD processes to ±0.1 °C — manufactured, serviced and repaired in Pflugerville, Texas.

Chiller CJ-PCU52R
ModelCJ-PCU52R
SV−20.0 °C
Range−20 ~ +80 °C
Accuracy±0.1 °C
Established
2005
Idle temperature accuracy
±0.1 °C
Cryochiller R&D
−80 °C
Convertible interface
AMAT · TEL · LAM
Safety compliance
CE · SEMI S2

Our products

Product
lineup

A complete line of standard and customized chillers, heat exchangers and THC units built for the specific demands of semiconductor and LCD fabs.

Also ESC — electrostatic chuck · Coolant

Coolant

Drop-in
coolants

Heat-transfer fluids that replace FC-3283, FC-40 and HFE-7200 — tested in the chiller, with data sheets ready to download.

Repair services

Repair & calibration, on every fab platform

Authorized service agent for NGK O2 analyzers, trained by NGK for repair and calibration. More than 20 years repairing and remodeling chillers, heat exchangers and THC units across the semiconductor and LCD industry.

All repair services →
Cryochiller unit opened for repair
Recent project · EDS processCryochiller
≤ −80 °C

Found the HFC refrigerant mix ratio that reaches −80 °C or below, enabling local repair with eco-friendly refrigerant.

Service & custom units

Need a repair or a custom unit?

Tell us the equipment model, the symptom and your process. We’ll review it and get back to you.