Temperature & Humidity Controller


A TCU (Temp. Control Unit) is primarily used in semiconductor and LCD plants to control the temperature during the Etch or CVD processes to improve the production efficiency. Due to enlargement of wafers, it requires precise control of temperature and Humidity. We are prepared for current trends of technology and what our customer needs.


  • Easy Operation
    • - Optimized footprint with LCD touch screen
  • Easy Maintenance
    • - All gauges showed on front side
  • High Accuracy Temperature
    • - PID Control Application
  • Low Vibration & Low dB
  • Leak Free & High Reliability Parts
  • High Accuracy by Electrode Control
  • Extension of Interface Applicatio
    • - Convertible interface for AMAT, TEL, LAM in one set
  • Customized Chiller
    • - Variable specification, interface type, optional function, etc.
  • Safety
    • - CE & Semi S2 are Available
  • Central Monitoring System (Optional)

Refrigerant Type


Refrigerant Type Basic Diagram



Model CJ-PCU52R
Item CH1 CH2
Low Temp High Temp
Cooling Type Compressor Type Compressor Type
Temperature Range -20 °C ~ +80 deg°C -10 °C ~ +80 deg°C
Temperature Accuracy (Idle) ±0.1 °C ±0.1 °C
Cooling Capacity 4800Watts at 20 deg °C 4000Watts at 20 deg °C
Max Flow Rate 25lpm, 0.5Mpa, 20 °C 25lpm, 0.5Mpa, 20 °C
Reservoir Volume 19 liter 19 liter
Coolant FC-3283 FC-3283
Refrigerant R-404a R-404a
Display LCD Color Touch Panel (Proface)
Interface Analog / Digital / Serial
Footprint 550 x 900 x 1710 (W x D x H)
Weight 390kg
Electrical Power 200-220 VAC, 3 phase, 50/60Hz (breaker: 60A)
Facility Cooling Water 20°C (±5°C), 25LPM, 0.3MPa minimum
Cooling Unit 5HP Compressor 2HP Compressor
Circulation Pump Magnet pump, 2Hp Magnet pump, 2Hp
Heater 5kW 4kW
Coolant Port 3/4" Tube Fitting 3/4" Tube Fitting
Facility Cooling Water Port 3/4" Tube Fitting

Temperature Heating and Cooling Time

Chiller Temperature Heating and Cooling Time