Chiller
Temperature control units for Etch and CVD processes, holding ±0.1 °C at idle.
Overview · Etch · CVD
Stable process temperature from −20 to +80 °C
A TCU (Temperature Control Unit) is primarily used in semiconductor and LCD plants to control temperature during Etch or CVD processes and improve production efficiency. As wafers grow larger, processes demand precise control of temperature and humidity.
We are prepared for current technology trends and for what our customers need — including customized specifications, interface types and optional functions.
- Model
- CJ-PCU52R
- Range
- −20 ~ +80 °C
- Accuracy
- ±0.1 °C
- Cooling capacity
- 4.8 kW
Features
Easy Operation
Optimized footprint with LCD touch screen
Easy Maintenance
All gauges on the front side
High-Accuracy Temperature
PID control application
Low Vibration & Low dB
Leak-Free & High-Reliability Parts
High Accuracy by Electrode Control
Extended Interface Application
Convertible interface for AMAT, TEL and LAM in one set
Customized Chiller
Variable specification, interface type, optional functions and more
Safety
CE & SEMI S2 available
Central Monitoring System
Optional
Drawings & performance
System diagrams and measured heat-up and cool-down behavior from the CJ-PCU52R product sheet.
Specification
Standard configuration. Specification, interface type and optional functions can be customized.
| Item | CH1 · Low temp | CH2 · High temp |
|---|---|---|
| Cooling type | Compressor type | Compressor type |
| Temperature range | −20 ~ +80 °C | −10 ~ +80 °C |
| Temperature accuracy (idle) | ±0.1 °C | ±0.1 °C |
| Cooling capacity | 4,800 W at 20 °C | 4,000 W at 20 °C |
| Max flow rate | 25 lpm, 0.5 MPa, 20 °C | 25 lpm, 0.5 MPa, 20 °C |
| Reservoir volume | 19 L | 19 L |
| Coolant | FC-3283 | FC-3283 |
| Refrigerant | R-404A | R-404A |
| Display | LCD color touch panel (Proface) | |
| Interface | Analog / Digital / Serial | |
| Footprint (W × D × H) | 550 × 900 × 1710 mm | |
| Color | Ivory | |
| Weight | 390 kg | |
| Electrical power | 200–220 VAC, 3 phase, 50/60 Hz (breaker: 60 A) | |
| Facility cooling water | 20 °C (±5 °C), 25 LPM, 0.3 MPa minimum | |
| Cooling unit | 5 HP compressor | 2 HP compressor |
| Circulation pump | Magnet pump, 2 HP | Magnet pump, 2 HP |
| Heater | 5 kW | 4 kW |
| Coolant port | 3/4″ tube fitting | 3/4″ tube fitting |
| Facility cooling water port | 3/4″ tube fitting | |
Other products
Service & custom units
Need a repair or a custom unit?
Tell us the equipment model, the symptom and your process. We’ll review it and get back to you.