Coolant

Name: CJ Tech, Inc.
Address: 1501 Panther Loop Bldg. 2-C, Pflugerville, TX, 78660, US
Telephone: +1 (512) 784-4301

Heat-transfer fluids for semiconductor and LCD chillers — drop-in replacements for FC-3283, FC-40 and HFE-7200, tested in the chiller before they reach your fab.

Download data sheets ↓Request a quote

Find your replacement

Pick the coolant your chiller runs today. Each replacement was run in the same chiller with set parameters unchanged.

Current coolantFC-3283−50 ~ +128 °CFL300 FL300R FCN130
Current coolantFC-40−57 ~ +155 °CFL470
Current coolantHFE-7200−138 ~ +76 °CCC900

Liquid range

From pour point to boiling point on a common −150 to +200 °C scale.

FL300Replaces FC-3283
−65 → 108 ~ 114 °C
FL300RReplaces FC-3283
−65 → 122 °C
FL470Replaces FC-40
−55 → 155 ~ 165 °C
FCN130Replaces FC-3283
−65 → 123 ~ 133 °C
CC900Replaces HFE-7200
−138 → 76 °C

Pour point → boiling pointBoiling range

FL series · Fluorinated heat-transfer fluid

FL300

Replaces FC-3283

Low-GWP heat-transfer fluid that replaces FC-3283 without changing chiller set parameters.

Boiling point: 108 ~ 114 °C
Pour point: −65 °C
Viscosity, 25 °C: 1.32 cSt
GWP: 120

Drop-in replacement for FC-3283 — chiller set parameters unchanged
GWP 120 · ODP 0 · no flash point
PFAS, PFOA and PFOS not detected in third-party testing
In production use for Etch, Clean and Diffusion processes (−20 ~ +70 °C)

Documents

FL300 technical data sheet1654 KB · Properties, test data, temperature curves Request MSDS · PFAS test report · GWP certificateSent by email after review

Chiller testIdle test — stabilization time (±0.2 °C)

Item	−10 → 20 °C	20 → 40 °C	40 → 20 °C	20 → −10 °C
FC-3283	500 s	660 s	278 s	526 s
FL300	514 s (+2.8 %)	640 s (−3.0 %)	252 s (−9.4 %)	456 s (−13.3 %)

Supply temperature control · 20 LPM · no load. Coolant exchanged in the same chiller with set parameters unchanged.

Chiller test10 kW heater load — stabilization time (±0.2 °C)

Item	Load on	Load off
FC-3283	244 s	160 s
FL300	242 s (−0.8 %)	160 s (same)

Supply temperature control · 20 LPM · 10 kW load at 20 °C. Coolant exchanged in the same chiller with set parameters unchanged.

DataFL300 additional data

Appearance	Colorless, transparent liquid
Purity	> 99.0 %

FL series · Fluorinated heat-transfer fluid

FL300R

Replaces FC-3283

Improved FL300 formulation for FC-3283 systems, with higher dielectric strength and lower viscosity.

Boiling point: 122 °C
Pour point: −65 °C
Viscosity, 25 °C: 1.07 cSt
GWP: —

Improved FL300 formulation — drop-in for FC-3283 systems
Dielectric strength above 40 kV · viscosity 1.07 cSt
Stabilizes 11.8 % faster than FC-3283 after a 10 kW load is removed
ODP 0 · no flash point

Documents

FL300R technical data sheet156 KB · Properties and test data Request MSDSSent by email after review

Chiller testIdle test — stabilization time (±0.2 °C)

Item	−10 → 20 °C	20 → 40 °C	40 → 20 °C	20 → −10 °C
FC-3283	444 s	750 s	306 s	440 s
FL300R	462 s (+4.1 %)	672 s (−10.4 %)	298 s (−2.6 %)	462 s (+5.0 %)

Supply temperature control · 20 LPM · no load. Coolant exchanged in the same chiller with set parameters unchanged.

Chiller test10 kW heater load — stabilization time (±0.2 °C)

Item	Load on	Load off
FC-3283	278 s	186 s
FL300R	270 s (−2.9 %)	164 s (−11.8 %)

Supply temperature control · 20 LPM · 10 kW load at 20 °C. Coolant exchanged in the same chiller with set parameters unchanged.

FL series · Fluorinated heat-transfer fluid

FL470

Replaces FC-40

High-temperature heat-transfer fluid that replaces FC-40 and reaches setpoint faster in CVD chillers.

Boiling point: 155 ~ 165 °C
Pour point: −55 °C
Viscosity, 25 °C: 3.03 cSt
GWP: 39

Drop-in replacement for FC-40 — chiller set parameters unchanged
Up to 41 % shorter stabilization time than FC-40 in idle tests
GWP 39 · ODP 0 · no flash point
PFAS not detected in third-party testing · in production use for CVD (60 ~ 120 °C)

Documents

FL470 technical data sheet1825 KB · Properties, test data, temperature curves Request MSDS · PFAS test report · GWP certificateSent by email after review

Chiller testIdle test — stabilization time (±0.1 °C)

Item	30 → 60 °C	60 → 80 °C	80 → 60 °C	60 → 30 °C
FC-40	1002 s	954 s	286 s	624 s
FL470	632 s (−37 %)	560 s (−41 %)	232 s (−19 %)	658 s (+5.4 %)

Return temperature control · 16.5 LPM · no load. Coolant exchanged in the same chiller with set parameters unchanged.

Chiller test1.6 kW heater load — stabilization time (±0.1 °C)

Item	Load on	Load off
FC-40	258 s	264 s
FL470	266 s (+3.1 %)	242 s (−8.3 %)

Return temperature control · 16.5 LPM · 1.6 kW load at 80 °C. Coolant exchanged in the same chiller with set parameters unchanged.

DataFL470 additional data

Appearance	Colorless, transparent liquid
Molecular weight	530 g/mol
Purity	≥ 99.0 %

FCN series · Fluorocarbon-nitrogen fluid

FCN130

Replaces FC-3283

Fluorocarbon fluid made to the same composition, physical properties and manufacturing method as FC-3283.

Boiling point: 123 ~ 133 °C
Pour point: −65 °C
Viscosity, 25 °C: 0.73 cSt
GWP: —

Same composition, physical properties and manufacturing method as FC-3283
Direct supply for competitive pricing and stable availability
Dielectric strength 56 kV · volume resistivity 10¹⁵ Ω·cm
ODP 0 · no flash point

Documents

FCN130 technical data sheet151 KB · Properties Request MSDSSent by email after review

DataFCN130 additional data

Appearance	Colorless, clear liquid
Average molecular weight	521 g/mol
Critical temperature	235 °C
Critical pressure	1.22 × 10⁶ Pa
Latent heat of vaporization (at boiling point)	78 J/g
Absolute viscosity	1.4 cP
Solubility of water in fluid	7 ppm by weight
Solubility of fluid in water	< 5 ppm by weight
Coefficient of expansion	0.0014 /°C
Refractive index	1.28

CC series · Low-temperature fluorinated fluid

CC900

Replaces HFE-7200

Low-temperature heat-transfer fluid that replaces HFE-7200 in chillers running down to −70 °C.

Boiling point: 76 °C
Pour point: −138 °C
Viscosity, 25 °C: 0.48 cSt
GWP: 55

Drop-in replacement for HFE-7200
Supply held at −70 °C ±1.0 °C under a 7 kW heater load
PV stable within ±0.3 °C · −70 ↔ +50 °C ramps in under 30 minutes
GWP 55 · ODP 0 · no flash point

Documents

CC900 technical data sheet162 KB · Properties and test data Request MSDSSent by email after review

Chiller testChiller test at −70 °C

Item	HFE-7200	CC900
PV stability at setpoint (no load)	±0.3 °C	±0.3 °C
−70 ↔ +50 °C ramp (no load)	≤ 30 min	≤ 30 min
Supply at −70 °C, 7 kW heater load	±1.0 °C	±1.0 °C

Same chiller run with each coolant: idle setpoint stability, −70 ↔ +50 °C ramps, and supply stability under a 7 kW heater load.

DataCC900 additional data

Effective content	> 99.5 %

Typical properties

Typical values for reference, not specifications. Full data per fluid is in each data sheet.

CompareFL300 · FL300R · FL470 · FCN130 · CC900

Item	FL300	FL300R	FL470	FCN130	CC900
Replaces	FC-3283	FC-3283	FC-40	FC-3283	HFE-7200
Boiling point (°C)	108 ~ 114	122	155 ~ 165	123 ~ 133	76
Pour point (°C)	−65	−65	−55	−65	−138
Liquid density (kg/m³)	1790	1820	1800	1820	1430
Kinematic viscosity, 25 °C (cSt)	1.32	1.07	3.03	0.73	0.48
Specific heat (J/kg·K)	974	1060	1100	1100	1220
Thermal conductivity (W/m·K)	0.083	0.079	0.068	0.066	0.068
Vapor pressure, 25 °C (kPa)	0.6	2.3	0.45	1.44	14.5
Dielectric strength, 2.54 mm gap (kV)	39	> 40	> 20	56	25
Surface tension (dyn/cm)	12.7	15.2	17	14.6	13.6
Dielectric constant (1 kHz)	2.11	2.05	4.8	—	7.5
Volume resistivity (Ω·cm)	1.4 × 10¹⁴	2.0 × 10¹⁵	1.0 × 10¹⁴	1 × 10¹⁵	1.0 × 10⁸
Water content	< 20 ppm	< 20 ppm	< 20 ppm	< 5 ppm	< 20 ppm
Acid value	< 10 ppm	< 10 ppm	< 20 ppm	—	< 10 ppm
ODP	0	0	0	0	0
GWP	120	—	39	—	55
Flash point	None	None	None	None	None

Downloads

CJ Tech technical data sheets (PDF). MSDS, PFAS test reports and GWP certificates are sent by email on request.

Request MSDS & certificates →

Service & custom units

Switching coolants?

Tell us your chiller model and current coolant. We’ll recommend a drop-in replacement and send the documents you need.

Request service →Call +1 (512) 784-4301