Heat Exchanger
Heat-exchanger type temperature control with all-stainless coolant tank and plumbing.
Overview · Etch · CVD
High-temperature control from 30 to 90 °C
Shaping the new standard of controlling temperature and humidity: maximized cooling and heating capacity keeps temperature uniformity and throughput. CJ Tech manufactures a complete line of standard and customized chillers, heat exchangers and THC units to meet the specific demands of semiconductor and LCD fabrication.
- Model
- CJ-PCU52W
- Range
- 30 ~ 90 °C
- Accuracy
- ±0.1 °C
- Cooling capacity
- 4.8 kW
Features
Easy Operation
Optimized footprint with LCD touch screen
High Performance for High Temp Range
High-Accuracy Temperature
PID control application
Low Vibration & Low dB
Leak-Free & High-Reliability Parts
All Stainless Steel
Coolant tank and plumbing
Extended Interface Application
Convertible interface for AMAT, TEL and LAM in one set
Safety
CE & SEMI S2 available
Improved Response Time
Drawings & performance
System diagrams and measured heat-up and cool-down behavior from the CJ-PCU52W product sheet.
Specification
Standard configuration. Specification, interface type and optional functions can be customized.
| Item | CH1 · Wall | CH2 · Top |
|---|---|---|
| Cooling type | Heat exchanger type | Heat exchanger type |
| Temperature range | 30 ~ 90 °C | 30 ~ 90 °C |
| Temperature accuracy (idle) | ±0.1 °C | ±0.1 °C |
| Cooling capacity | 4,800 W at 50 °C | 4,000 W at 20 °C |
| Max flow rate | 15 lpm, 0.5 MPa, 30 °C | 15 lpm, 0.5 MPa, 30 °C |
| Reservoir volume | 24 L | 24 L |
| Coolant | FC-3283 | FC-3283 |
| Refrigerant | N/A | N/A |
| Display | LCD color touch panel (Proface) | |
| Interface | RS232C, RS485 and analog | |
| Footprint (W × D × H) | 440 × 740 × 1145 mm | |
| Color | Ivory | |
| Weight | 405 kg | |
| Electrical power | 200–220 VAC, 3 phase, 50/60 Hz (breaker: 60 A) | |
| Facility cooling water | 20 °C (±5 °C), 25 LPM, 0.3 MPa minimum | |
| Cooling unit | Heat exchanger | Heat exchanger |
| Circulation pump | Magnet pump, 1.5 HP | Magnet pump, 1.5 HP |
| Heater | 6 kW | 6 kW |
| Coolant port | 3/4″ tube fitting | 3/4″ tube fitting |
| Facility cooling water port | 1″ tube fitting | |
Other products
Service & custom units
Need a repair or a custom unit?
Tell us the equipment model, the symptom and your process. We’ll review it and get back to you.