O2 Analyzer
Authorized service agent of NGK (Japan) for O2 analyzer repair and calibration.
Service agent of NGK · Japan
Repair and calibration for NGK O2 analyzers
We provide full repair service for O2 analyzers. The O2 analyzer is used in the Diffusion process of semiconductor plants to measure the concentration of O2 within N2 and prevent the formation of oxide during the process.
We are currently a service agent of NGK, a producer of O2 analyzers in Japan. CJ Tech is fully trained by NGK to provide repair and calibration services.
- Process
- Diffusion
- Measures
- O2 concentration in N2
- Service
- Repair & calibration
- Series
- SH-200 · TF
Serviced models
NGK SH-200 and TF series specifications for the analyzers we repair and calibrate.
| Item | SH-201-A | SH-201-B | SH-201-C |
|---|---|---|---|
| Sampling system | Ejector suction system | Pump suction system | Pump suction system |
| Setting range | 0–500 ppm ~ 0–50 % | 0–1000 ppm ~ 0–20 % | 0–100 ppm ~ 0–25 % |
| Calibration function | Air 1-point calibration (standard gas calibration is required for the 0–100 ppm range) | Air 1-point calibration (standard gas not required) | Air 1-point calibration (standard gas calibration is required for the 0–100 ppm range) |
| Linearity | ±2 %FS | ||
| Repeatability | ±1 %FS | ||
| Drift | ±2 %FS / week | ||
| Response time | Within 30 s | ||
| Warm-up time | 3 min | ||
| Power voltage | 100 V AC | 200 V AC | 100 V AC |
| Item | TF-21D201 | TF-30D201 |
|---|---|---|
| Sensor | TF-21D201 | TF-30 |
| Receiver | DFT-201 | |
| Measurement principle | Zirconia concentration cell system | Zirconia 2-cell pump critical current system |
| Measuring ranges | Min. 0–10 ppm ~ max. 0–100 % 4 freely selected ranges (zero point fixed) | Min. 0–10 ppm ~ max. 0–100 % 4 freely selected ranges Note: cannot measure 25 % O2 or greater |
| Scope of measurement | 0 – Air | |
| Calibration | Air point calibration, max. 4 points | Air point + max. 3-point calibration by calibration gas Air 1-point calibration (0–1000 ppm or greater) Calibration by data input (0–1000 ppm or greater, when the sensor is exchanged) |
| Output | 1 point 4–20 mA (non-isolated, load resistance < 600 Ω) 1 point 0–1 V, 0–5 V or 0–10 V (non-isolated) | 1 point 4–20 mA (non-isolated, load resistance < 600 Ω) 1 point 0–1 V, 0–5 V or 0–10 V (non-isolated) |
| Sample / calibration gas flow | 0.5 ± 0.02 L/min | 0.5 ± 0.1 L/min |
| Reproducibility | ±1 % F.S. | ±1 % F.S. (0–25 % fixed range: ±0.5 % F.S.) |
| Linearity | Over 0–100 ppm: ±2 % F.S. Under 0–100 ppm: ±3 % F.S. | ±2 % F.S. (0–25 % fixed range: ±1.0 % F.S.) |
| Response time (90 %, calibration gas switching) | 0–1 % or greater: < 10 s Under 0–1 %: < 30 s | Over 0–1000 ppm: < 30 s Under 0–1000 ppm: < 60 s |
| Drift | Less than ±2 % F.S. / week | |
| Power supply | AC 85–132 V (option: AC 170–264 V, DC 24 V ±10 %) | |
| Contact input (no-voltage) | Range switch input | |
| Contact output (open collector, DC 25 V, max. 50 mA, NO/NC switchable) | Analyzer abnormality · range echo back (2 or 3 range identification) · ready · concentration upper / lower limit alarm (0.0–9990.0 ppm or 0.0–100.0 %) Any 4 of the above can be assigned; settings can be changed | |
| Range switching | Local / remote / auto range switching (selectable) | |
| First-order lag setting | 0–99 s | |
| Output hold setting | Off, a set value, or the value 5 s before an abnormality During warm-up, HOLD applies if there is a sensor or receiver abnormality | |
| Concentration limit alarms | Upper and lower limits: 0.0–9990.0 ppm or 0.0–100.0 % | |
| RS232C communication | Transmits measurement state, error code, measurement range and value Cable: straight cable | |
Certificate
Trained and certified by NGK
CJ Tech received full training on NGK O2 analyzers to provide repair and calibration services. Select the certificate to enlarge it.
Service & custom units
Analyzer drifting or out of calibration?
Send the model and the symptom. We’ll review it and schedule repair or calibration.