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Temperature & Humidity Controller

Shaping the new standard of controlling temperature and humidity — standard and customized units for semiconductor and LCD fabrication.

TCU · Etch & CVD

Temperature control units

A temperature control unit (TCU) is primarily used in semiconductor and LCD plants to control temperature during Etch or CVD processes and improve production efficiency. As wafers grow larger, processes require precise control of temperature and humidity.

Chiller →Heat Exchanger →

THC · Photo

Temperature & humidity controllers

The temperature & humidity controller (THC) is used in the Photo process of semiconductor and LCD plants to control temperature and humidity during manufacturing.

THC →

Lineup

Maximized cooling and heating capacity keeps temperature uniformity and throughput. Every unit can be customized in specification, interface and optional functions.

Chiller

CJ-PCU52R−20 ~ +80 °C

Heat Exchanger

CJ-PCU52W30 ~ 90 °C

THC

CJ-THC52R20 ~ 25 °C · 40–50 %RH

Gas analysisO2 AnalyzerTrace O2 in N2 for diffusion — principle, models, service →Wafer clampingESCElectrostatic chuck — construction, types, applications →Heat-transfer fluidsCoolantFL300 · FL300R · FL470 · FCN130 · CC900 — data sheets →

Operating ranges

Controllable temperature per channel on a common −80 to +100 °C scale.

  • Chiller · CH1CJ-PCU52R−20 ~ +80 °C
  • Chiller · CH2CJ-PCU52R−10 ~ +80 °C
  • Heat ExchangerCJ-PCU52W+30 ~ +90 °C
  • THCCJ-THC52R+20 ~ +25 °C

Service & custom units

Need a repair or a custom unit?

Tell us the equipment model, the symptom and your process. We’ll review it and get back to you.

Request service →Call +1 (512) 784-4301