THC
Temperature & humidity controllers for coater and developer environments.
Overview · Photo (coater & developer)
Air temperature and humidity for the photo process
The THC (Temperature & Humidity Controller) is used in the Photo process of semiconductor and LCD manufacturing plants to control temperature and humidity during manufacturing.
Shaping the new standard of controlling temperature and humidity: maximized cooling and heating capacity keeps temperature uniformity and throughput. CJ Tech manufactures a complete line of standard and customized chillers, heat exchangers and THC units to meet the specific demands of semiconductor and LCD fabrication.
- Model
- CJ-THC52R
- Range
- 20 ~ 25 °C · 40–50 %RH
- Accuracy
- ±0.1 °C / ±0.5 %RH
- Air volume
- 15.3 m³/min
Features
Wide Applicability & Compact Footprint
Easy Maintenance
All gauges on the front side
High-Accuracy Temperature & Humidity Control
PID control application
Low Vibration & Low dB
Leak-Free & High-Reliability Parts
Auto Check of Trouble Source
Extended Interface Application
Convertible interface for AMAT, TEL and LAM in one set
All Stainless Steel Appearance
Process Application
Wafer environment in coater & developer; high performance for photoresist uniformity
High Accuracy by Running Control
Safety
CE & SEMI S2 available
Central Monitoring System
Optional
Drawings & performance
System diagrams and measured heat-up and cool-down behavior from the CJ-THC52R product sheet.
Specification
Standard configuration. Specification, interface type and optional functions can be customized.
| Item | CH1 · Temperature | CH2 · Humidity |
|---|---|---|
| Cooling type | Compressor type | |
| Temp. & humidity range | +20 ~ +25 °C | 40 ~ 50 % |
| Temp. & humidity accuracy | ±0.1 °C | ±0.5 %RH |
| Air volume | 15.3 m³/min | |
| Water supply type | DI | DI |
| Refrigerant | R-404A | |
| Display | LCD color touch panel (Proface) | |
| Interface | RS-232C | |
| Color | Ivory | |
| Weight | 470 kg | |
| Electrical power | 200–220 VAC, 3 phase, 50/60 Hz (breaker: 75 A) | |
| Facility cooling water | 20 °C (±5 °C), 25 LPM, 0.3 MPa minimum | |
| Cooling unit | 0.75 HP compressor | |
| Facility cooling water port | 3/4″ tube fitting | |
Other products
Service & custom units
Need a repair or a custom unit?
Tell us the equipment model, the symptom and your process. We’ll review it and get back to you.