Services
Repair, calibration and remodeling for the thermal equipment and analyzers that keep fabs running.
Service
O2 Analyzer Service
Repair and calibration as a service agent of NGK (Japan).
ServiceTemperature & Humidity Controller Service
Repair and remodeling of every temperature and humidity control device used in fabs.
ServiceChiller Service
Refrigerant and cascade-type chillers for Etch and EDS processes.
ServiceHeat Exchanger Service
Water-cooled heat exchangers for high-temperature process loops.
ServiceTHC Service
Temperature and humidity controllers for the Photo process.
Service & custom units
Need a repair or a custom unit?
Tell us the equipment model, the symptom and your process. We’ll review it and get back to you.