Chiller
A TCU (Temp. Control Unit) is primarily used in semiconductor and LCD plants to control the temperature during the Etch or CVD processes to improve the production efficiency. Due to enlargement of wafers, it requires precise control of temperature and Humidity. We are prepared for current trends of technology and what our customer needs.
Features
- Easy Operation: Optimized footprint with LCD touch screen
- Easy Maintenance: All gauges showed on front side
- High Accuracy Temperature: PID Control Application
- Low Vibration & Low dB
- Leak Free & High Reliability Parts
- High Accuracy by Electrode Control
- Extension of Interface Application: Convertible interface for AMAT, TEL, LAM in one set
- Customized Chiller: Variable specification, interface type, optional function, etc.
- Safety: CE & Semi S2 are Available
- Central Monitoring System (Optional)
Refrigerant Type
Refrigerant Type Basic Diagram
Specification
| Model | CJ-PCU52R | |
|---|---|---|
| Item | CH1 | CH2 |
| Low Temp | High Temp | |
| Cooling Type | Compressor Type | Compressor Type |
| Temperature Range | -20 °C ~ +80 deg°C | -10 °C ~ +80 deg°C |
| Temperature Accuracy (Idle) | ±0.1 °C | ±0.1 °C |
| Cooling Capacity | 4800Watts at 20 deg °C | 4000Watts at 20 deg °C |
| Max Flow Rate | 25lpm, 0.5Mpa, 20 °C | 25lpm, 0.5Mpa, 20 °C |
| Reservoir Volume | 19 liter | 19 liter |
| Coolant | FC-3283 | FC-3283 |
| Refrigerant | R-404a | R-404a |
| Display | LCD Color Touch Panel (Proface) | |
| Interface | Analog / Digital / Serial | |
| Footprint | 550 x 900 x 1710 (W x D x H) | |
| Color | IVORY | |
| Weight | 390kg | |
| Electrical Power | 200-220 VAC, 3 phase, 50/60Hz (breaker: 60A) | |
| Facility Cooling Water | 20°C (±5°C), 25LPM, 0.3MPa minimum | |
| Cooling Unit | 5HP Compressor | 2HP Compressor |
| Circulation Pump | Magnet pump, 2Hp | Magnet pump, 2Hp |
| Heater | 5kW | 4kW |
| Coolant Port | 3/4″ Tube Fitting | 3/4″ Tube Fitting |
| Facility Cooling Water Port | 3/4″ Tube Fitting | |
Temperature Heating and Cooling Time
