Temperature & Humidity Controller

Shaping the new standard of controlling temperature & Humidity

• Maximized cooling and heating capacity assured to keep temperature uniformity and toroughput
• CJ Tech manufactures a complete line of standard and customized chiller, heat exchanger, THC to meet the specific demands of semi-conductor and LCD fabrications

A temperature control unit (TCU) is primarily used in semiconductor and LCD plants to control the temperature during the Etch or CVD processes to improve the production efficiency. Due to enlargement of wafers, it requires precise control of temperature and Humidity.

The temperature & humidity controller (THC) is used in the photo process from semiconductor and LCD manufacturing plants to control temperature and humidity during the manufacturing process.