THC
The THC (Temperature & Humidity Controller) is used in the Photo process from Semiconductor and LCD manufacturing plants to control temperature and humidity during the manufacturing process.
Features
- Shaping the new standard of controlling temperature & Humidity
- Maximized cooling and heating capacity assured to keep temperature uniformity and toroughput
- CJ Tech manufactures a complete line of standard and customized chiller, heat exchanger, THC to meet the specific demands of semi-conductor and LCD fabrications
- Wide Applicability and Compact FootPrint
- Easy Maintenance
- All gauges showed on front side
- High Accuracy Temperature and Humidity Control
- PID Control Application
- Low Vibration & Low dB
- Leak Free & High Reliability Parts
- Auto Check of Trouble Source
- Extension of Interface Application
- Convertible interface for AMAT, TEL, LAM in one set
- All Stainless Steel Appearance
- Process Application
- Wafer environment in coater & developer
- High performance for photo resist uniformity
- High Accuracy by Running Control
- Safety
- CE & Semi S2 are Available
- Central Monitoring Systems (Optional)
Refrigerant Type
Refrigerant Type Basic Diagram
Specification
| Model | CJ-THC52R | ||
|---|---|---|---|
| Item | CH1 | CH2 | |
| Temp. | Humidity | ||
| Cooling Type | Compressor Type | ||
| Temp. & Humidity Range | +20°C ~ +25°C | 40 ~ 50% | |
| Tempe. & Humidity Accuracy | ±0.1 °C | ±0.5% RH | |
| Air Volume | 15.3 m3/min | ||
| Water Supply Type | DI | DI | |
| Refrigerant | R-404a | ||
| Display | LCD Color Touch Panel (Proface) | ||
| Interface | RS-232C | ||
| Color | IVORY | ||
| Weight | 470kg | ||
| Electrical Power | 200-220 VAC, 3 phase, 50/60Hz (breaker: 75A) | ||
| Facility Cooling Water | 20°C (±5°C), 25LPM, 0.3MPa minimum | ||
| Cooling Unit | 0.75HP Compressor | ||
| Facility Cooling Water Port | 3/4″ Tube Fitting | ||
Temperature Heating and Cooling Time
