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The THC (Temperature & Humidity Controller) is used in the Photo process from Semiconductor and LCD manufacturing plants to control temperature and humidity during the manufacturing process.


  • Shaping the new standard of controlling temperature & Humidity
    • Maximized cooling and heating capacity assured to keep temperature uniformity and toroughput
    • CJ Tech manufactures a complete line of standard and customized chiller, heat exchanger, THC to meet the specific demands of semi-conductor and LCD fabrications
  • Wide Applicability and Compact FootPrint
  • Easy Maintenance
    • All gauges showed on front side
  • High Accuracy Temperature and Humidity Control
    • PID Control Application
  • Low Vibration & Low dB
  • Leak Free & High Reliability Parts
  • Auto Check of Trouble Source
  • Extension of Interface Application
    • Convertible interface for AMAT, TEL, LAM in one set
  • All Stainless Steel Appearance
  • Process Application
    • Wafer environment in coater & developer
    • High performance for photo resist uniformity
  • High Accuracy by Running Control
  • Safety
    • CE & Semi S2 are Available
  • Central Monitoring Systems (Optional)

Refrigerant Type

Refrigerant Type Basic Diagram


Model CJ-THC52R
Item CH1 CH2
Temp. Humidity
Cooling Type Compressor Type
Temp. & Humidity Range +20°C ~ +25°C 40 ~ 50%
Tempe. & Humidity Accuracy ±0.1 °C ±0.5% RH
Air Volume 15.3 m3/min
Water Supply Type DI DI
Refrigerant R-404a
Display LCD Color Touch Panel (Proface)
Interface RS-232C
Weight 470kg
Electrical Power 200-220 VAC, 3 phase, 50/60Hz (breaker: 75A)
Facility Cooling Water 20°C (±5°C), 25LPM, 0.3MPa minimum
Cooling Unit 0.75HP Compressor
Facility Cooling Water Port 3/4″ Tube Fitting

Temperature Heating and Cooling Time