O2 Analyzer Service
We are providing full repair service of O2 Analyzer. O2 Analyzer is used in the Diffusion process from Semiconductor plants. The purpose of O2 Analyzer is to measure the concentration level of O2 within N2 to prevent the formation of oxide during the process. We are currently service agent of NGK, a producer of O2 Analyzer in Japan. CJ Tech. is well trained and received full knowledge of O2 Analyzer from NGK to provide repair and calibration services.
SH-200 Series
| SH-201-A | SH-201-B | SH-201-C | |
|---|---|---|---|
| Sampling system | Ejector suction system | Pump suction system | Pump suction system |
| Setting range | 0-500 ppm ~ 0-50% | 0-1000 ppm ~ 0-20% | 0-100 ppm ~ 0-25% |
| Calibration function | Point Air 1 calibration (standard gas calibration is required for the 0 to 100 ppm range) | Point Air 1 calibration (standard gas not required) | Point Air 1 calibration (standard gas calibration is required for the 0 to 100 ppm range) |
| Linearity | ±2%FS | ±2%FS | ±2%FS |
| Repeatability | ±1%FS | ±1%FS | ±1%FS |
| Drift | ±2%FS/week | ±2%FS/week | ±2%FS/week |
| Response Time | Within 30 Sec | Within 30 Sec | Within 30 Sec |
| Warm-up Time | 3 min | 3 min | 3 min |
| Power Voltage | 100 V AC | 200 V AC | 100 V AC |
TF Series
TF Series Specifications
| MODEL | TF-21D201 | TF-30D201 |
|---|---|---|
| SENSOR | TF-21D201 | TF-30 |
| RECEIVER | DFT-201 | DFT-201 |
| MEASUREMENT PRINCIPLES | Zirconia concentration cell system | Zirconia 2 cell pump critical current system |
| MEASURE RANGES | Min. 0-10ppm ~ Max. 0-100% 4 freely-selected ranges (zero point fixed) |
Min. 0-10ppm ~ Max. 0-100% 4 freely-selected ranges Note : It cannot measure 25% O2 or greater |
| SCOPE OF MEASUREMENT | 0-Air | 0-Air |
| CALIBRATION | Possible to calibrate AIR point, max 4 points | * Air point + max 3 point calibration by calibration gas * Air 1 point calibration (0-1000ppm or greater) * Calibration by data input (0-1000ppm or greater, at time of exchanged sensor) |
| OUTPUT | 1 Point at 4-20mA (Non-isolated output, load resistance less than 600Ω) 1 Point at either 0-1V, or 0-5V, or 0-10V x 1 (Non isolated output) |
1 point at 4-20mA (non-isolated output, load resistance less than 600Ω) 1 point at either 0-1V, or 0-5V, or 0-10V (non-isolated output) |
| SAMPLE GAS, CALIBRATION GAS FLOW AMOUNT |
0.5 ± 0.02L/Min | 0.5 ± 0.1L/Min |
| REPRODUCIBILITY | ± 1% F.S. | ± 1% F.S. However, in the case of a 0-25% fixed range, ±0.5%F.S. |
| LINEARITY | * Over 0-100ppm : ± 2% F.S. Under 0-100PPM : ± 3% F.S. |
± 2% F.S. However, in the case of a 0-25% fixed range, ±1.0%F.S. |
| RESPONSE TIME | * 0-1% or greater : less than 10 seconds Under 0-1% : less than 30 seconds * 90% Response due to calibration gas switching |
* Over 0-1000ppm : less than 30 seconds * Under 0-1000ppm : less than 60 seconds * 90% Response due to calibration gas switching |
| Drift | Less than ± 2% F.S. / week | Less than ± 2% F.S. / week |
| POWER SUPPLY | AC85 ~ 132V * Option : AC170 ~ 264V, DC24V ± 10% |
AC85 ~ 132V * Option : AC170 ~ 264V, DC24V ± 10% |
| CONTACT INPUT (NO VOLTAGE CONTACT INPUT) |
Range switch input | Range switch input |
| CONTACT OUTPUT (OPEN COLLECTOR OUTPUT. DC25V, Max 50mA CAN SWITCH BETWEEN NO/NC) |
* Analyzer abnormalities * Range echo back (2 Range identification) * Range echo back (3 Range identification) * Ready * Concentration upper limit alarm (can be set 0.0 ~ 9990.0ppm or 0.0 ~ 100.0%) * Concentration low limit alarm (can be set 0.0 ~ 9990.0ppm or 0.0 ~ 100.0%) * 4 point can be chosen from the above, and setting changes are possible |
* Analyzer abnormalities * Range echo back (2 Range identification) * Range echo back (3 Range identification) * Ready * Concentration upper limit alarm (can be set 0.0 ~ 9990.0ppm or 0.0 ~ 100.0%) * Concentration low limit alarm (can be set 0.0 ~ 9990.0ppm or 0.0 ~ 100.0%) * 4 point can be chosen from the above, and setting changes are possible |
| RANGE SWITCHING | Local range switching / Remote range switching/ Auto range switching * Choose from the above, setting changes are possible |
Local range switching / Remote range switching/ Auto range switching * Choose from the above, setting changes are possible |
| FIRST ORDER LAG SETTINGS | Can be set from 0-99 seconds | Can be set from 0-99 seconds |
| OUTPUT HOLD SETTINGS | Hold maybe turned off or set a desired value, or set to apply 5 seconds before the occurrence of an abnormality * At warm-up time, HOLD will apply if there is a sensor or receiver abnormality |
Hold maybe turned off or set a desired value, or set to apply 5 seconds before the occurrence of an abnormality * At warm-up time, HOLD will apply if there is a sensor or receiver abnormality |
| CONCENTRATION UPPER AND LOWER LIMIT ALARM |
* Upper limit alarm : can be set 0.0 ~ 9990.0ppm or 0.0 ~ 100.0% * Lower limit alarm : can be set 0.0 ~ 9990.0ppm or 0.0 ~ 100.0% |
* Upper limit alarm : can be set 0.0 ~ 9990.0ppm or 0.0 ~ 100.0% * Lower limit alarm : can be set 0.0 ~ 9990.0ppm or 0.0 ~ 100.0% |
| RS232C COMMUNICATIONS FUNCTION |
Transmission of measurement state, error cide, measurement range, measurement value Communications cable specifications : straight cable |
Transmission of measurement state, error cide, measurement range, measurement value Communications cable specifications : straight cable |
Certificate
